Features of formation of gas cluster ion beams

Vacuum 2015 / 09 Vol. 119

Features of formation of gas cluster ion beams

Korobeishchikov, N.G., Kalyada, V.V., Skovorodko, P.A., Shmakov, A.A., Khodakov, M.D., Shulzhenko, G.I., Voskoboynikov, R.V., Zarvin, A.E.
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Volume:
119
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.05.039
Date:
September, 2015
File:
PDF, 1.59 MB
english, 2015
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