Configurable Compliant Substrates for SiGe Nanomembrane...

Crystal Growth & Design 2015 / 07 Vol. 15; Iss. 7

Configurable Compliant Substrates for SiGe Nanomembrane Fabrication

Aqua, Jean-Noël, Favre, Luc, Ronda, Antoine, Benkouider, Abdelmalek, Berbezier, Isabelle
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Volume:
15
Language:
english
Journal:
Crystal Growth & Design
DOI:
10.1021/acs.cgd.5b00485
Date:
July, 2015
File:
PDF, 7.00 MB
english, 2015
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