Transfer of 3 in GaAs film on silicon substrate by proton...

Electronics Letters 1998 Vol. 34; Iss. 4

Transfer of 3 in GaAs film on silicon substrate by proton implantation process

Jalaguier, E., Aspar, B., Pocas, S., Michaud, J.F., Zussy, M., Papon, A.M., Bruel, M.
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Volume:
34
Year:
1998
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19980265
File:
PDF, 477 KB
english, 1998
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