Vertically etched silicon nano-rods as a sensitive electron...

Journal of Micromechanics and Microengineering 2015 / 07 Vol. 25; Iss. 7

Vertically etched silicon nano-rods as a sensitive electron detector

Hajmirzaheydarali, M, Akbari, M, Soleimani-Amiri, S, Sadeghipari, M, Shahsafi, A, Akhavan Farahani, A, Mohajerzadeh, S
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/7/074003
Date:
July, 2015
File:
PDF, 1.37 MB
english, 2015
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