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Vertically etched silicon nano-rods as a sensitive electron detector
Hajmirzaheydarali, M, Akbari, M, Soleimani-Amiri, S, Sadeghipari, M, Shahsafi, A, Akhavan Farahani, A, Mohajerzadeh, SVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/7/074003
Date:
July, 2015
File:
PDF, 1.37 MB
english, 2015