Energy study of buckled micromachined beams for thin-film...

Journal of Micromechanics and Microengineering 1999 / 12 Vol. 9; Iss. 4

Energy study of buckled micromachined beams for thin-film stress measurements applied to SiO 2

Nicu, Liviu, Temple-Boyer, Pierre, Bergaud, Christian, Scheid, Emmanuel, Martinez, Augustin
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Volume:
9
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/9/4/319
Date:
December, 1999
File:
PDF, 1.23 MB
english, 1999
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