Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam
Umnov, S, Asainov, OVolume:
81
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/81/1/012001
Date:
April, 2015
File:
PDF, 1.00 MB
english, 2015