Toward Smart Surfaces Using High-Density Arrays of Silicon-Based Mechanical Oscillators
BOURBON, GILLES, MINOTTI, PATRICE, HELIN, PHILIPPE, FUJITA, HIROYUKIVolume:
10
Journal:
Journal of Intelligent Material Systems and Structures
DOI:
10.1106/vdq4-2eb9-tl7d-vqpv
Date:
July, 1999
File:
PDF, 1.47 MB
1999