Direct-write X-ray lithography using a hard X-ray Fresnel zone plate
Lee, Su Yong, Noh, Do Young, Lee, Hae Cheol, Yu, Chung-Jong, Hwu, Yeukuang, Kang, Hyon CholVolume:
22
Language:
english
Journal:
Journal of Synchrotron Radiation
DOI:
10.1107/s1600577515003306
Date:
May, 2015
File:
PDF, 1008 KB
english, 2015