![](/img/cover-not-exists.png)
[IEEE 2015 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2015.4.19-2015.4.23)] 2015 IEEE International Reliability Physics Symposium - Reliability of HfAlOx in multi layered gate stack
Bhuyian, M. Nasir, Misra, D.Year:
2015
Language:
english
DOI:
10.1109/irps.2015.7112821
File:
PDF, 731 KB
english, 2015