[IEEE 2014 International Symposium on Optomechatronic Technologies (ISOT 2014) - Seattle, WA, USA (2014.11.5-2014.11.7)] 2014 International Symposium on Optomechatronic Technologies - Recent Development of Using Optical Methods to Measure the Mechanical Properties of Thin Films
Tong, Chi-Jia, Lin, Ming-Tzer, Wu, Chung Lin, Cheng, Ya-ChiYear:
2014
Language:
english
DOI:
10.1109/isot.2014.29
File:
PDF, 306 KB
english, 2014