Proton-Radiation Tolerance of Silicon and SU-8 as...

Journal of Microelectromechanical Systems 2013 / 12 Vol. 22; Iss. 6

Proton-Radiation Tolerance of Silicon and SU-8 as Structural Materials for High-Reliability MEMS

Bandi, Tobias, Polido-Gomes, Joao, Neels, Antonia, Dommann, Alex, Marchand, Laurent, Shea, Herbert R.
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Volume:
22
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2013.2262596
Date:
December, 2013
File:
PDF, 3.66 MB
english, 2013
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