In-Plane Displacement Detection With Picometer Accuracy on...

Journal of Microelectromechanical Systems 2015 / 6 Vol. 24; Iss. 3

In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

Kokorian, Jaap, Buja, Federico, van Spengen, Willem Merlijn
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2335153
Date:
June, 2015
File:
PDF, 2.24 MB
english, 2015
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