CMOS-Compatible Self-Aligned In0.53Ga0.47As MOSFETs With...

IEEE Transactions on Electron Devices 2014 / 10 Vol. 61; Iss. 10

CMOS-Compatible Self-Aligned In0.53Ga0.47As MOSFETs With Gate Lengths Down to 30 nm

Majumdar, Amlan, Sun, Yanning, Cheng, Cheng-Wei, Kim, Young-Hee, Rana, Uzma, Martin, Ryan M., Bruce, Robert L., Shiu, Kuen-Ting, Zhu, Yu, Farmer, Damon B., Hopstaken, Marinus, Joseph, Eric A., de Souz
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2014.2335747
Date:
October, 2014
File:
PDF, 766 KB
english, 2014
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