Scheduling and Analysis of Start-Up Transient Processes for...

IEEE Transactions on Semiconductor Manufacturing 2015 / 5 Vol. 28; Iss. 2

Scheduling and Analysis of Start-Up Transient Processes for Dual-Arm Cluster Tools With Wafer Revisiting

Pan, Chun Rong, Qiao, Yan, Zhou, Meng Chu, Wu, Nai Qi
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Volume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2015.2390644
Date:
May, 2015
File:
PDF, 1.22 MB
english, 2015
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