Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2008 / 11 Vol. 26; Iss. 6
![](/img/cover-not-exists.png)
Quality assessment of antisticking layers for thermal nanoimprint
Scheer, H.-C., Häfner, W., Fidler, A., Möllenbeck, S., Bogdanski, N.Volume:
26
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3013342
Date:
November, 2008
File:
PDF, 474 KB
english, 2008