Quality assessment of antisticking layers for thermal...

Quality assessment of antisticking layers for thermal nanoimprint

Scheer, H.-C., Häfner, W., Fidler, A., Möllenbeck, S., Bogdanski, N.
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Volume:
26
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3013342
Date:
November, 2008
File:
PDF, 474 KB
english, 2008
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