Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
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Fabrication of nanoscale, high throughput, high aspect ratio freestanding gratings
Bruccoleri, Alexander, Mukherjee, Pran, Heilmann, Ralf K., Yam, Jonathan, Schattenburg, Mark L., DiPiazza, FrankVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4755815
File:
PDF, 1.89 MB
english, 2012