Fabrication of nanoscale, high throughput, high aspect...

Fabrication of nanoscale, high throughput, high aspect ratio freestanding gratings

Bruccoleri, Alexander, Mukherjee, Pran, Heilmann, Ralf K., Yam, Jonathan, Schattenburg, Mark L., DiPiazza, Frank
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4755815
File:
PDF, 1.89 MB
english, 2012
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