Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1987 / 11 Vol. 5; Iss. 6
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Properties of direct current magnetron reactively sputtered TaN
Mehrotra, BholaVolume:
5
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.583826
Date:
November, 1987
File:
PDF, 835 KB
english, 1987