Impact of realistic source shape and flexibility on source...

Journal of Micro/Nanolithography MEMS and MOEMS 2013 / 12 Vol. 13; Iss. 1

Impact of realistic source shape and flexibility on source mask optimization

Aoyama, Hajime, Mizuno, Yasushi, Hirayanagi, Noriyuki, Kita, Naonori, Matsui, Ryota, Izumi, Hirohiko, Tajima, Keiichi, Siebert, Joachim, Demmerle, Wolfgang, Matsuyama, Tomoyuki
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Volume:
13
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.13.1.011005
Date:
December, 2013
File:
PDF, 7.88 MB
english, 2013
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