SPIE Proceedings [SPIE Optical Systems Design - St. Etienne, France (Tuesday 30 September 2003)] Advances in Optical Thin Films - EUV and soft x-ray multilayer optics
Kaiser, Norbert, Yulin, Sergiy, Feigl, Torsten, Bernitzki, Helmut, Lauth, Hans, Amra, Claude, Kaiser, Norbert, Macleod, H. AngusVolume:
5250
Year:
2004
Language:
english
DOI:
10.1117/12.512502
File:
PDF, 1.05 MB
english, 2004