SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] MOEMS and Miniaturized Systems VIII - Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer
Grahmann, Jan, Conrad, Holger, Sandner, Thilo, Klose, Thomas, Schenk, Harald, Dickensheets, David L., Schenk, Harald, Piyawattanametha, WiboolVolume:
7208
Year:
2009
Language:
english
DOI:
10.1117/12.808151
File:
PDF, 603 KB
english, 2009