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SPIE Proceedings [SPIE Photonics Asia 2010 - Beijing, China (Monday 18 October 2010)] Holography, Diffractive Optics, and Applications IV - Projection photolithography method for fabricating continuous surface structure with aperture less than 10 μm
Shi, Lifang, Zhang, Weiguo, Dong, Xiaochun, Ye, Yutang, Du, Chunlei, Sheng, Yunlong, Yu, Chongxiu, Chen, LinsenVolume:
7848
Year:
2010
Language:
english
DOI:
10.1117/12.869473
File:
PDF, 6.04 MB
english, 2010