Generation of low-temperature gas discharge plasma in large...

Russian Journal of General Chemistry 2015 / 5 Vol. 85; Iss. 5

Generation of low-temperature gas discharge plasma in large vacuum volumes for plasma chemical processes

Koval, N. N., Ivanov, Yu. F., Lopatin, I. V., Akhmadeev, Yu. H., Shugurov, V. V., Krysina, O. V., Denisov, V. V.
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Volume:
85
Language:
english
Journal:
Russian Journal of General Chemistry
DOI:
10.1134/s1070363215050485
Date:
May, 2015
File:
PDF, 1.41 MB
english, 2015
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