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Crystallinity of Gallium-Doped Zinc Oxide Films Deposited by DC Magnetron Sputtering Using Ar, Ne or Kr Gas
Kon, Masato, Song, Pung Keun, Mitsui, Akira, Shigesato, YuzoVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.41.6174
Date:
October, 2002
File:
PDF, 960 KB
english, 2002