Preparation and Characterization of Fluorocarbon Thin Films...

Japanese Journal of Applied Physics 2003 / 6 Vol. 42; Iss. Part 2, No

Preparation and Characterization of Fluorocarbon Thin Films Deposited by Soft X-Ray Ablation of Polytetrafluoroethylene

Kanashima, Takeshi, Maida, Osamu, Kohma, Norihiro, Okumoto, Masaki, Ueno, Masato, Kitai, Satoshi, Okuyama, Masanori, Ohashi, Haruhiko
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.l603
Date:
June, 2003
File:
PDF, 185 KB
english, 2003
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