![](/img/cover-not-exists.png)
Work Function Modulation by Segregation of Indium through Tungsten Gate for Dual-Metal-Gate Complementary Metal Oxide Semiconductor Applications
Nakajima, Kazuaki, Koyama, Masato, Aoyama, Tomonori, Nishiyama, Akira, Eguchi, Kazuhiro, Suguro, KyoichiVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.46.1885
Date:
April, 2007
File:
PDF, 152 KB
english, 2007