(Keynote) Atomic Layer Deposition Trends and Challenges in High-k/Metal Gate and Alternative Channel CMOS Processing
Chudzik, M. P., Krishnan, S., Dai, M., Siddiqui, S., Shepard, J., Kwon, U.Volume:
60
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06001.0513ecst
Date:
February, 2014
File:
PDF, 370 KB
english, 2014