Improvement of Electrical Properties of MOCVD HfO[sub 2] by...

Electrochemical and Solid-State Letters 2003 Vol. 6; Iss. 11

Improvement of Electrical Properties of MOCVD HfO[sub 2] by Multistep Deposition

Yeo, Chia Ching, Cho, Byung Jin, Joo, Moon Sig, Whoang, Sung Jin, Kwong, Dim Lee, Bera, L. K., Mathew, Shajan, Balasubramanian, N.
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Volume:
6
Year:
2003
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1618071
File:
PDF, 90 KB
english, 2003
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