Characterization of Embedded Rhomboidal Microchannels...

Journal of The Electrochemical Society 2004 Vol. 151; Iss. 8

Characterization of Embedded Rhomboidal Microchannels Formation on Silicon (100) Surface

D’Arrigo, Giuseppe, Spinella, Corrado, Rimini, Emanuele, Rubino, Loredana, Lorenti, Simona
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Volume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1765772
File:
PDF, 766 KB
english, 2004
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