Effect of Mechanical Properties of PVA Brush Rollers on Frictional Forces during Post-CMP Scrubbing
Philipossian, Ara, Mustapha, LateefVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1782092
File:
PDF, 604 KB
english, 2004