![](/img/cover-not-exists.png)
[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Facet Propagation in Si and SiGe Epitaxy or Etching
Dutartre, Didier, Talbot, Alexandre, Loubet, NicolasVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355845
File:
PDF, 2.86 MB
english, 2006