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[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Advanced Electrochemical Processes for Sub-50 nm On-chip Metallization
Akolkar, Rohan, Cheng, Chin-Chang, Chebiam, Ramanan, Fajardo, Arnel, Dubin, ValeryVolume:
2
Year:
2007
Language:
english
DOI:
10.1149/1.2408859
File:
PDF, 472 KB
english, 2007