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[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Electrochemical Mechanical Planarization (eCMP) of Copper Thin Films
Aksu, Serdar, Emesh, Ismail, Uzoh, Cyprian, Basol, BulentVolume:
2
Year:
2007
Language:
english
DOI:
10.1149/1.2408895
File:
PDF, 543 KB
english, 2007