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[ECS 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT) - Barga, Italy (July 28 - August 3, 2007)] ECS Transactions - Investigation of Hump Degradation by F-N stress for Narrow Width n-MOSFETs with Shallow Trench Isolation (STI)
Seo, Jae Yong, Seok, Jeong-Eun, Kim, Hyun-Jung, Lee, Sang-keun, Jeon, Jae-Eun, Kim, Yeong-Geun, Lee, Won-ShikVolume:
8
Year:
2007
Language:
english
DOI:
10.1149/1.2767289
File:
PDF, 467 KB
english, 2007