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[ECS 2007 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT) - Barga, Italy (July 28 - August 3, 2007)] ECS Transactions - In-line Automatic Defect Inspection and Repair Method for a High Yield TFT Array Production
Honoki, Hideyuki, Nakasu, Nobuaki, Arai, Takeshi, Yoshimura, Kazushi, Edamura, TadaoVolume:
8
Year:
2007
Language:
english
DOI:
10.1149/1.2767319
File:
PDF, 331 KB
english, 2007