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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Improvement of Interface Properties of W/La2O3/Si MOS Structure Using Al Capping Layer
Tachi, Kiichi, Kakushima, Kuniyuki, Ahmet, Parhat, Tsutsui, Kazuo, Sugii, Nobuyuki, Hattori, Takeo, Iwai, HiroshiVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779560
File:
PDF, 516 KB
english, 2007