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[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - 3D Simulation Software for Visualization of MEMS Microfabrication Processes
Colombo, Fabio B., Hokama, Paula M., Tsuda, Fernando, Jankauskas, Rafael G., De Souza, Douglas F., Kayatt, Pedro, Carreño, Marcelo N.Volume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956023
File:
PDF, 895 KB
english, 2008