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[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Analysis of Electromigration in Dual-Damascene Interconnect Structures

Lacerda de Orio, Roberto, Carniello, Sara, Ceric, Hajdin, Selberherr, Siegfried
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Volume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956048
File:
PDF, 244 KB
english, 2008
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