[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23,...

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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Cylinder Materials of Construction for Ultra-High Purity HBr in Advanced Semiconductor Etch Processes

Seymour, Adam J., Wyse, Carrie, Yao, Jianlong, Jha, P., Olsen, E. W., Raynor, Mark, Torres, Robert
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Year:
2008
Language:
english
DOI:
10.1149/1.3035369
File:
PDF, 248 KB
english, 2008
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