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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Drying Impact on Semiconductor Surfaces after Innovative Solvent Exposure
Le Tiec, Yannick, Fournel, Frank, Rochat, Névine, Barnes, Jean-Paul, Veillerot, Marc, Morales, Christophe, Moriceau, Hubert, Clavelier, Laurent, Rieutord, Francois, Morote, Carlos, Vandenbossche, MarYear:
2009
Language:
english
DOI:
10.1149/1.3202645
File:
PDF, 608 KB
english, 2009