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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Atomic Layer Deposition of Materials for Phase-Change Memories
Leskelä, Markku, Pore, Viljami, Hatanpää, Timo, Heikkilä, Mikko, Ritala, Mikko, Schrott, Alejandro, Raoux, Simone, Rossnagel, StephenYear:
2009
Language:
english
DOI:
10.1149/1.3205074
File:
PDF, 444 KB
english, 2009