Stick-Slip Transitions in Chemical Mechanical Planarization
Vlahakis, J., Manno, V. P., Rogers, C. B., White, R.Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3380915
File:
PDF, 324 KB
english, 2010