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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - (Invited) Synchrotron Radiation Photoelectron Spectroscopy of Metal Gate/HfSiO(N)/SiO(N)/Si Stack Structures
Oshima, Masaharu, Toyoda, Satoshi, Kamada, H., Tanimura, T., Nakamura, Yoshiaki, Horiba, K., Kumigashira, H.Year:
2010
Language:
english
DOI:
10.1149/1.3481610
File:
PDF, 780 KB
english, 2010