ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV...

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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Leakage Current in TiN/HfO

Cimino, Salvatore, Padovani, Andrea, Larcher, Luca, Afanas'ev, Valeri V., Hwang, Hyeon Jun, Lee, Young Gon, Jurczak, Malgorzata, Wouters, Dirk J., Lee, Byoung Hun, Hwang, Hyunsang, Pantisano, Luigi
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Year:
2010
Language:
english
DOI:
10.1149/1.3481643
File:
PDF, 384 KB
english, 2010
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