![](/img/cover-not-exists.png)
ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Leakage Current in TiN/HfO
Cimino, Salvatore, Padovani, Andrea, Larcher, Luca, Afanas'ev, Valeri V., Hwang, Hyeon Jun, Lee, Young Gon, Jurczak, Malgorzata, Wouters, Dirk J., Lee, Byoung Hun, Hwang, Hyunsang, Pantisano, LuigiYear:
2010
Language:
english
DOI:
10.1149/1.3481643
File:
PDF, 384 KB
english, 2010