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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Novel Test Structures for Hermeticity Testing of Wafer Bonding Technologies
Schneider, Arnold, Rank, Holger, Müller-Fiedler, Roland, Wittler, Olaf, Reichl, HerbertYear:
2010
Language:
english
DOI:
10.1149/1.3483499
File:
PDF, 361 KB
english, 2010