ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Advanced Residual Stress Analysis on the Heteroepitaxial Growth of 3C-SiC/Si for MEMS Application
Anzalone, Ruggero, Camarda, Massimo, D'Arrigo, Giuseppe, Piluso, Nicolò, Severino, Andrea, Canino, Andrea, La Magna, Antonino, La Via, FrancescoYear:
2011
Language:
english
DOI:
10.1149/1.3570853
File:
PDF, 296 KB
english, 2011