ECS Transactions [ECS 219th ECS Meeting - Montreal, QC,...

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ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Effect of Atomic Hydrogen in SiN

Keum, Ki-Su, Lee, Kyoung-Min, Hwang, Jae-Dam, No, Kil-Sun, Hong, Wan-Shick
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Year:
2011
Language:
english
DOI:
10.1149/1.3647857
File:
PDF, 326 KB
english, 2011
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