ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Effect of Atomic Hydrogen in SiN
Keum, Ki-Su, Lee, Kyoung-Min, Hwang, Jae-Dam, No, Kil-Sun, Hong, Wan-ShickYear:
2011
Language:
english
DOI:
10.1149/1.3647857
File:
PDF, 326 KB
english, 2011