ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Advanced Inspection Technique for High Aspect Ratio Contact Holes Using e Beam Scan and Voltage Cap in SEM Review
Liao, Hsiang-Chou, Hung, Che-Lun, Luoh, Tuung, Yang, Ling-Wu, Yang, Tahone, Chen, Kuang-Chao, Lu, Chih-YuanYear:
2012
Language:
english
DOI:
10.1149/1.3694449
File:
PDF, 518 KB
english, 2012