RF Magnetron Sputtering Aluminum Oxide Film for Surface Passivation on Crystalline Silicon Wafers
Chen, Siming, Tao, Luping, Zeng, Libin, Hong, RuijiangVolume:
2013
Year:
2013
Language:
english
Journal:
International Journal of Photoenergy
DOI:
10.1155/2013/792357
File:
PDF, 316 KB
english, 2013