A New Z-axis Silicon Micromachined Vibrating Gyroscope

International Journal of Nonlinear Sciences and Numerical Simulation 2002 / 01 Vol. 3; Iss. 3-4

A New Z-axis Silicon Micromachined Vibrating Gyroscope

Qiu, An-Ping, Wang, Shou-rong, Zhou, Bai-ling
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Volume:
3
Language:
english
Journal:
International Journal of Nonlinear Sciences and Numerical Simulation
DOI:
10.1515/ijnsns.2002.3.3-4.325
Date:
January, 2002
File:
PDF, 1.03 MB
english, 2002
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