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Achieving High-Performance Bulk Silicon Electrothermal Actuator on CMOS Substrate
Cai, Chun Hua, Qin, MingVolume:
229-231
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.229-231.2178
Date:
November, 2012
File:
PDF, 491 KB
english, 2012